Research Progress and Development Prospects of Enhanced GaN HEMTs
نویسندگان
چکیده
With the development of energy efficiency technologies such as 5G communication and electric vehicles, Si-based GaN microelectronics has entered a stage rapid industrialization. As new generation microwave millimeter wave devices, High Electron Mobility Transistors (HEMTs) show great advantages in frequency, gain, noise performance. continuous advancement material growth technology, epitaxial semiconductor heterojunction can accurately control doping level, thickness, alloy composition. Consequently, HEMTs have been greatly improved from structure to device structure. Device performance also significantly improved. In this paper, we briefly describe MOCVD technology research progress HEMT films, examine compare “state art” enhanced analyze reliability CMOS compatibility look future directions possible development.
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ژورنال
عنوان ژورنال: Crystals
سال: 2023
ISSN: ['2073-4352']
DOI: https://doi.org/10.3390/cryst13060911